MEMS-Based Hydrogen Sensors: A State of the Art Review

Abstract

This paper is set to show the requirements, properties and limitations of currently researched MEMS-based hydrogen sensors. It draws an outline on what measurement principles in combination with metal thin films are used to achieve functional MEMS sensors. Furthermore, the importance of more extensive simulation and calculation to understand the complex interaction between a hydrogen sensitive thin film and a MEMS structure is examined based on several previous works.