Growing carbon nanotubes by microwave plasma-enhanced chemical vapor deposition

Lu‐Chang Qin; Dan Zhou; A.R. Krauss; D.M. Gruen

doi:10.17615/798g-an93

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Growing carbon nanotubes by microwave plasma-enhanced chemical vapor deposition

Lu‐Chang Qin Dan Zhou A.R. Krauss D.M. Gruen

Year: 2023

DOI: 10.17615/798g-an93

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Abstract

A processing route has been developed to grow bundles of carbon nanotubes on substrates from methane and hydrogen mixtures by microwave plasma-enhanced chemical vapor deposition, catalyzed by iron particles reduced from ferric nitrate. Growth takes place at about 900°C leading to nanotubes with lengths of more than 20 μm and diameters on the nanometer scale.

Keywords:

Carbon nanotube Chemical vapor deposition Microwave Plasma Materials science Carbon fibers Nanotechnology Deposition (geology) Plasma processing Chemical engineering Composite material Computer science Physics

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Carbon Nanotubes in Composites

Physical Sciences → Materials Science → Materials Chemistry

Graphene research and applications

Physical Sciences → Materials Science → Materials Chemistry

Nanotechnology research and applications

Physical Sciences → Engineering → Biomedical Engineering

Growing carbon nanotubes by microwave plasma-enhanced chemical vapor deposition

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