Shear mode bulk acoustic wave type gyroscope based on c-axis tilted ScAlN piezoelectric films

Abstract

Transmission and detection type piezoelectric gyroscope with two c-axis tilted ScAlN films are fabricated. By adjusting the in-plane tilt angles to 90 degrees, the polarities of shear wave generated at upper layer (input) cannot be detected at lower layer (output) at a still state. However, due to the Coriolis force, the in-plane rotation of shear wave polarity can be detected when the device is rotated. The transmission and detection type gyroscope device was simulated using Mason's equivalent circuit model.