Silicon Thin Film Crystallization Annealing System Using Blue Laser Diode

Yingbao Yang; Seiya Toriyama; Masahiro Kinoshita; Kaoru Saito; Takuya Sawai; Junichi Koshigi; Jun Gotoh; Shigeto Sugimoto; Jingbao Yao; Rui Zhao; Jinming Li; Shouqing Chen

doi:10.36463/idw.2022.0287

JOURNAL ARTICLE

Silicon Thin Film Crystallization Annealing System Using Blue Laser Diode

Yingbao Yang Seiya Toriyama Masahiro Kinoshita Kaoru Saito Takuya Sawai Junichi Koshigi Jun Gotoh Shigeto Sugimoto Jingbao Yao Rui Zhao Jinming Li Shouqing Chen

Year: 2022 Journal: Proceedings of the International Display Workshops Pages: 287-287

DOI: 10.36463/idw.2022.0287

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Keywords:

Materials science Crystallization Annealing (glass) Silicon Optoelectronics Thin film Laser diode Laser Diode Blue laser Optics Composite material Nanotechnology Chemical engineering Engineering

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Silicon Thin Film Crystallization Annealing System Using Blue Laser Diode

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