Diamond-carbide-silicon composite "skeleton" as a promising material for X-ray optical substrates

Abstract

The paper proposes the use of diamond-carbide-silicon composite "Skeleton"oledR coated with amorphous silicon as substrates for multilayer X-ray mirrors for powerful synchrotron radiation sources (3+ and 4th generation). The surfaces with the following parameters were obtained using standard deep polishing methods: flatness at the level of RMS 90% =54.2 nm; effective roughness sigma eff ~1.0 nm; high-frequency roughness sigma 2x2 ~0.1 nm. Keywords: x-ray optics, x-ray mirrors, substrates for x-ray mirrors, roughness.