Flexible Wafer-Scale Silicon-Photonics Fabrication Platform

Milica Notaros; Thomas D. Dyer; Ashton Hattori; Kevin Fealey; Seth Kruger; Jelena Notaroš

doi:10.1364/fio.2022.fw1e.3

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JOURNAL ARTICLE

Flexible Wafer-Scale Silicon-Photonics Fabrication Platform

Milica Notaros Thomas D. Dyer Ashton Hattori Kevin Fealey Seth Kruger Jelena Notaroš

Year: 2022 Journal: Frontiers in Optics + Laser Science 2022 (FIO, LS) Pages: FW1E.3-FW1E.3

DOI: 10.1364/fio.2022.fw1e.3

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Abstract

We develop a wafer-scale CMOS-compatible platform and fabrication process that results in 300-mm-diameter flexible wafers, and experimentally demonstrate key functionality at visible wavelengths, including chip coupling, waveguide routing, and passive devices.

Keywords:

Wafer Fabrication Wafer-scale integration Silicon photonics Materials science Photonics Optoelectronics Waveguide Wafer fabrication Chip Wafer-level packaging Wafer bonding CMOS Silicon Electronic engineering Computer science Engineering Telecommunications

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Topics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Flexible Wafer-Scale Silicon-Photonics Fabrication Platform

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