JOURNAL ARTICLE

Facile fabrication of microstructured surface using laser speckle for high-sensitivity capacitive pressure sensors

Zhaomin TongChangYuan SunYifei MaMei WangSuotang JiaXuYuan Chen

Year: 2022 Journal:   Science China Technological Sciences Vol: 66 (1)Pages: 155-164   Publisher: Springer Science+Business Media
Keywords:
Materials science Polydimethylsiloxane Photolithography Speckle pattern Fabrication Laser Capacitive sensing Microstructure Optics Optoelectronics Soft lithography Nanotechnology Composite material

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6
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0.67
FWCI (Field Weighted Citation Impact)
33
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0.58
Citation Normalized Percentile
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Citation History

Topics

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