Facile fabrication of microstructured surface using laser speckle for high-sensitivity capacitive pressure sensors

Zhaomin Tong; ChangYuan Sun; Yifei Ma; Mei Wang; Suotang Jia; XuYuan Chen

doi:10.1007/s11431-022-2250-8

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Facile fabrication of microstructured surface using laser speckle for high-sensitivity capacitive pressure sensors

Zhaomin Tong ChangYuan Sun Yifei Ma Mei Wang Suotang Jia XuYuan Chen

Year: 2022 Journal: Science China Technological Sciences Vol: 66 (1)Pages: 155-164 Publisher: Springer Science+Business Media

DOI: 10.1007/s11431-022-2250-8

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Keywords:

Materials science Polydimethylsiloxane Photolithography Speckle pattern Fabrication Laser Capacitive sensing Microstructure Optics Optoelectronics Soft lithography Nanotechnology Composite material

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Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Tactile and Sensory Interactions

Life Sciences → Neuroscience → Cognitive Neuroscience

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Facile fabrication of microstructured surface using laser speckle for high-sensitivity capacitive pressure sensors

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