Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applications

Rekha Devi; Sandeep Singh Gill; Balwinder Singh

doi:10.1016/j.measen.2022.100522

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Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applications

Rekha Devi Sandeep Singh Gill Balwinder Singh

Year: 2022 Journal: Measurement Sensors Vol: 24 Pages: 100522-100522 Publisher: Elsevier BV

DOI: 10.1016/j.measen.2022.100522

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Keywords:

Piezoresistive effect Deflection (physics) Microelectromechanical systems Materials science Pressure sensor Diaphragm (acoustics) Pressure measurement Stress (linguistics) Acoustics Composite material Structural engineering Mechanical engineering Optoelectronics Optics Engineering Vibration Physics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applications

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