JOURNAL ARTICLE

Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applications

Rekha DeviSandeep Singh GillBalwinder Singh

Year: 2022 Journal:   Measurement Sensors Vol: 24 Pages: 100522-100522   Publisher: Elsevier BV
Keywords:
Piezoresistive effect Deflection (physics) Microelectromechanical systems Materials science Pressure sensor Diaphragm (acoustics) Pressure measurement Stress (linguistics) Acoustics Composite material Structural engineering Mechanical engineering Optoelectronics Optics Engineering Vibration Physics

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8
Cited By
0.86
FWCI (Field Weighted Citation Impact)
45
Refs
0.70
Citation Normalized Percentile
Is in top 1%
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Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
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