JOURNAL ARTICLE

High-K Nanocomposite Zro2/Tio2 Thin Films Deposited by Chemical Beam Vapor Deposition for Dielectric Applications

Keywords:
Nanocomposite Materials science Dielectric Chemical vapor deposition Thin film Combustion chemical vapor deposition High-κ dielectric Electron beam physical vapor deposition Deposition (geology) Physical vapor deposition Chemical engineering Nanotechnology Carbon film Optoelectronics

Metrics

0
Cited By
0.00
FWCI (Field Weighted Citation Impact)
0
Refs
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Electrophoretic Deposition in Materials Science
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

Related Documents

JOURNAL ARTICLE

Plasma-enhanced chemical vapor deposition of TiO2 thin films for dielectric applications

Wenli YangColin A. Wolden

Journal:   Thin Solid Films Year: 2006 Vol: 515 (4)Pages: 1708-1713
BOOK-CHAPTER

Chemical Vapor Deposition and Dielectric Thin Films

Hong Xiao

Society of Photo-Optical Instrumentation Engineers eBooks Year: 2013
JOURNAL ARTICLE

Thin films of ZrO2 metal organic chemical vapor deposition

L. Ben‐DorA. ElshteinS. HalabiI. PinskyJ. Shappir

Journal:   Journal of Electronic Materials Year: 1984 Vol: 13 (2)Pages: 263-272
JOURNAL ARTICLE

Chemical solution deposition of thin TiO2-anatase films for dielectric applications

M. Es‐SouniIlona Oja AçikMalle Krunks

Journal:   Journal of Materials Science Materials in Electronics Year: 2004 Vol: 15 (6)Pages: 341-344
© 2026 ScienceGate Book Chapters — All rights reserved.