Effect of Annealing Temperature on Solar-Blind Ultraviolet Photodetectors Based on Solution-Processed Scandium Oxide Films

Abstract

The detection of solar-blind ultraviolet (SBUV) has received extensive attention from academia and the industry owing to the indispensable applications in many fields, based on which providing suitable photosensitive materials for SBUV photodetectors is necessary and important accordingly. In this study, ScO _x films were fabricated by the solution method with the effect of annealing temperature on film quality as well as the performance of SBUV photodetectors analyzed. Combined with the effects from surface roughness and oxygen vacancy ratio of the films, it has been proved that the photodetector fabricated on a ScO _x film annealed at 500 °C is an ideal one with the best performance exhibited. The fabrication method proposed in this research, that is, preparing ScO _x SBUV photodetectors based on solution-processed films, both provides a new option of materials for SBUV detection and reduces the fabrication costs.