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JOURNAL ARTICLE

基于小孔点衍射的超精面形瞬态干涉测量技术

张金鹏 ZHANG Jinpeng 高芬 GAO Fen 李兵 LI Bing

Year: 2022 Journal: ACTA PHOTONICA SINICA Vol: 51 (4)Pages: 0412004-0412004 Publisher: Chinese Optical Society

DOI: 10.3788/gzxb20225104.0412004

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