JOURNAL ARTICLE

Humidity-Independent, Highly Sensitive and Selective NO2 Sensor Based on In2O3 Nanoflowers Decorated With Graphite Nanoflakes

Fubo GuDan WangJingfeng WangPuhong WangDongmei HanZhihua WangZhihong QiaoYunli Hu

Year: 2022 Journal:   IEEE Sensors Journal Vol: 22 (15)Pages: 14753-14761   Publisher: IEEE Sensors Council

Abstract

Metal oxide semiconductor (MOS) gas sensor is an effective tool for NO 2 detection. However, their performance is seriously influenced by humidity due to water vapor poisoning, and it remains a challenge to develop an anti-humidity NO 2 MOS sensor. In this work, a humidity-independent, highly sensitive and selective NO 2 sensor based on In 2 O 3 nanoflowers decorated with graphite nanoflakes was fabricated, which exhibited excellent anti-humidity and stability (response fluctuation within 7%) in a wide relative humidity (RH) range of 20% - 90%. The fabricated sensor had a high response of 10 to ppb level NO 2 (RH 80%). Besides, the sensor exhibited good selectivity, low operating temperature (75 °C) and rapid response speed (50 s to 5 ppm NO 2 ). The reason for the excellent anti-humidity function was investigated. Large amounts of polar groups were formed on the graphite nanoflakes after hydrothermal treatment, which enhanced the interaction between the graphite and In 2 O 3 and made the surface of the composites have a strong water absorption function. Moreover, the intrinsic hydrophobic property of the graphite can effectively block the interference of water vapor to the moisture-sensitive In 2 O 3 . Our work provides a new idea for enhancing the anti-humidity performance of the MOS sensors and can broaden their applications in a variety of complex environments.

Keywords:
Relative humidity Humidity Materials science Analytical Chemistry (journal) Chemistry Physics Organic chemistry Thermodynamics

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