Depth estimation from a single SEM image using pixel-wise fine-tuning with multimodal data

Tim Houben; T. J. Huisman; Maxim Pisarenco; Fons van der Sommen; Peter H. N. de With

doi:10.1007/s00138-022-01314-w

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Depth estimation from a single SEM image using pixel-wise fine-tuning with multimodal data

Tim Houben T. J. Huisman Maxim Pisarenco Fons van der Sommen Peter H. N. de With

Year: 2022 Journal: Machine Vision and Applications Vol: 33 (4) Publisher: Springer Science+Business Media

DOI: 10.1007/s00138-022-01314-w

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Keywords:

Critical dimension Computer science Pixel Metrology Artificial neural network Artificial intelligence A priori and a posteriori Ground truth Algorithm Optics Physics

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Image Processing Techniques and Applications

Physical Sciences → Engineering → Media Technology

Optical measurement and interference techniques

Physical Sciences → Computer Science → Computer Vision and Pattern Recognition

Advancements in Photolithography Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Depth estimation from a single SEM image using pixel-wise fine-tuning with multimodal data

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