JOURNAL ARTICLE
4105. Polyimide membrane X-ray lithography masks—fabrication and distortion measurements. (USA)
Year: 1979 Journal: Vacuum Vol: 29 (8-9)Pages: 328-328 Publisher: Elsevier BV
Keywords:
Polyimide Fabrication Lithography Materials science X-ray lithography Distortion (music) Membrane Optics Resist X-ray Optoelectronics Nanotechnology Chemistry Physics Layer (electronics)
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Topics
Synthesis and properties of polymers
Physical Sciences → Materials Science → Polymers and Plastics
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