JOURNAL ARTICLE

4105. Polyimide membrane X-ray lithography masks—fabrication and distortion measurements. (USA)

Year: 1979 Journal:   Vacuum Vol: 29 (8-9)Pages: 328-328   Publisher: Elsevier BV
Keywords:
Polyimide Fabrication Lithography Materials science X-ray lithography Distortion (music) Membrane Optics Resist X-ray Optoelectronics Nanotechnology Chemistry Physics Layer (electronics)

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Topics

Synthesis and properties of polymers
Physical Sciences →  Materials Science →  Polymers and Plastics

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