Micro- and Nanoporous Materials Developed Using Supercritical CO₂

Abstract

A number of different types of nanoporous materials for use in low dielectric constant applications have been developed in recent years, including nanoporous silica, polyimides, poly(arylethers), and poly(methyl silsesquioxanes). Recently, much research has been done in the field of supercritical carbon dioxide (scCO2) and its use in the synthesis of polymers for microelectronic applications. A variety of different methods using supercritical CO2 to form micro- and nanoporous materials towards applications in the microelectronic industry are described.