BOOK
Nanolithography and patterning techniques in microelectronics
Keywords:
Microelectronics Nanolithography Nanotechnology Materials science Fabrication Medicine
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16
Cited By
0.44
FWCI (Field Weighted Citation Impact)
0
Refs
0.80
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Citation History
Topics
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
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