JOURNAL ARTICLE

Dry processing in microelectronics: towards low pressure plasma technology

Year: 1991 Journal:   Microelectronics Reliability Vol: 31 (5)Pages: 1055-1055   Publisher: Elsevier BV
Keywords:
Microelectronics Plasma Materials science Engineering Nanotechnology Physics Nuclear physics

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Topics

Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Electronic Packaging and Soldering Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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