Characterisation of the κ-Al2O3 → α-Al2O3 transformation in different single layer coatings of CVD κ-Al2O3

P.-A. Hansson

doi:10.1016/02578-9729(50)25804-

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Characterisation of the κ-Al2O3 → α-Al2O3 transformation in different single layer coatings of CVD κ-Al2O3

P.-A. Hansson

Year: 1995 Journal: Surface and Coatings Technology Vol: 76-77 Pages: 256-264 Publisher: Elsevier BV

DOI: 10.1016/02578-9729(50)25804-

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Keywords:

Materials science Transformation (genetics) Stacking Nucleation Microstructure Isothermal process Coating Layer (electronics) Atmospheric temperature range Isothermal transformation diagram Crystallography Metallurgy Thermodynamics Composite material Chemistry

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Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Copper Interconnects and Reliability

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Characterisation of the κ-Al2O3 → α-Al2O3 transformation in different single layer coatings of CVD κ-Al2O3

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