BOOK-CHAPTER
Chemical Vapor Deposition (CVD)
Keywords:
Chemical vapor deposition Materials science Combustion chemical vapor deposition Deposition (geology) Chemical engineering Chemistry Nanotechnology Engineering Biology Carbon film Thin film
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Citation History
Topics
Electrohydrodynamics and Fluid Dynamics
Physical Sciences → Engineering → Electrical and Electronic Engineering
Ion-surface interactions and analysis
Physical Sciences → Engineering → Computational Mechanics
Mass Spectrometry Techniques and Applications
Physical Sciences → Chemistry → Spectroscopy
Related Documents
BOOK-CHAPTER
Chemical Vapor Deposition (CVD)
Dimitrios PeroulisPrashant R. WaghmareSushanta K. MitraSupone ManakasettharnJ. Ashley TaylorTom N. KrupenkinWenguang ZhuGilbert Daniel NessimFrancelyne MaranoRina GuadagniniFernando Rodrigues‐LimaJean‐Marie DupretArmelle Baeza-SquibanSonja BolandJeong Young ParkSeajin OhMarc MadouYoke Khin YapBurcu AslanHee Dong HanGabriel Lopez‐BeresteinAnil K. SoodMichael S.-C. LuHongwei QuHuikai XieHuikai XieYing ZhouLarry L. HowellA. T. ConliskLeonid V. ZhigileiAlexey N. VolkovAvinash M. DongareZheng YinYubo FanStephen T.C. WongVishnu VRN. R. AluruWeicong LiHarry KwokReinhold Wannemacher
Year: 2012 Pages: 422-427