Wavelength Phase-shift Dual-diffraction Interferometer

Abstract

This paper presents a wavelength phase-shift dual-diffraction interferometer for the displacement measurement. The measurement system is divided into two parts. On the part of the optical configuration, the grating displacement is converted into the phase of the light based on Doppler effect. By means of the dual-diffraction design, the phase sensitivity corresponding to the grating shift is enhanced. The second part is the phase analysis system. Because of the unbalance optical path design and the modulated wavelength, the wavelength phase-shift technique is developed for analyzing the phase variation resulted from the grating displacement. The experimental results demonstrate that this system has good stability and repeatability.