JOURNAL ARTICLE
Electroadhesive microgrippers
Year: 2003 Journal: Industrial Robot the international journal of robotics research and application Vol: 30 (4)Pages: 326-330 Publisher: Emerald Publishing Limited
Abstract
Describes the benefits of using electroadhesion when handling very delicate, polished and/or coated optical and electro‐optical microcomponents. Electroadhesion is a technique already familiar to those working in the semiconductor industry and is eminently suitable for the handling of microcomponents in air, gas or vacuum.
Keywords:
Semiconductor Manufacturing engineering Materials science Mechanical engineering Process engineering Engineering Computer science Optoelectronics
Metrics
57
Cited By
0.00
FWCI (Field Weighted Citation Impact)
1
Refs
0.45
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Laser Material Processing Techniques
Physical Sciences → Engineering → Computational Mechanics
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