JOURNAL ARTICLE

Advanced Residual Stress Analysis on the Heteroepitaxial Growth of 3C-SiC/Si for MEMS Application

Abstract

Abstract not Available.

Keywords:
Residual stress Materials science Microelectromechanical systems Stress (linguistics) Optoelectronics Engineering physics Composite material Electronic engineering Engineering

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Topics

Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Silicon Carbide Semiconductor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced ceramic materials synthesis
Physical Sciences →  Materials Science →  Ceramics and Composites
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