Advanced Residual Stress Analysis on the Heteroepitaxial Growth of 3C-SiC/Si for MEMS Application

Ruggero Anzalone; Massimo Camarda; Giuseppe D’Arrigo; Nicolò Piluso; Andrea Severino; Antonino La Magna; Francesco La Via

doi:10.1149/ma2011-01/24/1479

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Advanced Residual Stress Analysis on the Heteroepitaxial Growth of 3C-SiC/Si for MEMS Application

Ruggero Anzalone Massimo Camarda Giuseppe D’Arrigo Nicolò Piluso Andrea Severino Antonino La Magna Francesco La Via

Year: 2011 Journal: ECS Meeting Abstracts Vol: MA2011-01 (24)Pages: 1479-1479 Publisher: Institute of Physics

DOI: 10.1149/ma2011-01/24/1479

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Keywords:

Residual stress Materials science Microelectromechanical systems Stress (linguistics) Optoelectronics Engineering physics Composite material Electronic engineering Engineering

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Advanced Surface Polishing Techniques

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Advanced Residual Stress Analysis on the Heteroepitaxial Growth of 3C-SiC/Si for MEMS Application

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