Non-destructive permittivity measurement of substrates

Abstract

The permittivity of a thin flat dielectric is calculated from the characteristics of the H-011 resonance in a cylindrical cavity with the specimen inserted an the central transverse plane. Dielectric constants from 1 to 300 and loss tangents as low as 30/spl plusmn/10 ppm have been determined. No irreversible specimen preparation is required.< >