BOOK-CHAPTER
Integrated Vacuum Microsensor Systems in CMOS Technology
Year: 2018 Micro/Nano technologies Pages: 577-594 Publisher: Springer Nature
Keywords:
CMOS Fabrication Optoelectronics Electrical engineering Materials science Etching (microfabrication) Vacuum chamber Surface micromachining Electronic engineering Ultra-high vacuum Engineering Nanotechnology
Metrics
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Cited By
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FWCI (Field Weighted Citation Impact)
25
Refs
0.41
Citation Normalized Percentile
Is in top 1%
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Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Analytical Chemistry and Sensors
Physical Sciences → Chemical Engineering → Bioengineering
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