JOURNAL ARTICLE
Fluidic device with integrated capacitive micromachined ultrasonic transducers
B.T. Khuri-YakubF. Levent Degertekin
Year: 2005 Journal: The Journal of the Acoustical Society of America Vol: 118 (1)Pages: 18-18 Publisher: Acoustical Society of America
Keywords:
Capacitive micromachined ultrasonic transducers Ultrasonic sensor Capacitive sensing Acoustics Transducer Materials science Fluidics Optoelectronics Electrical engineering Engineering Physics
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0.67
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Citation History
Topics
Engineering Technology and Methodologies
Physical Sciences → Engineering → Industrial and Manufacturing Engineering
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