BOOK-CHAPTER
Plasma-Enhanced Chemical Vapor Deposition (Plasma Polymerization)
Keywords:
Plasma Chemical vapor deposition Polymerization Plasma polymerization Materials science Chemical engineering Environmental chemistry Chemistry Nanotechnology Composite material Polymer Physics Nuclear physics Engineering
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Topics
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Surface Modification and Superhydrophobicity
Physical Sciences → Materials Science → Surfaces, Coatings and Films
Related Documents
JOURNAL ARTICLE
Plasma-Enhanced Chemical Vapor Deposition
Journal: Journal of the Japan Society for Precision Engineering Year: 2016 Vol: 82 (11)Pages: 956-960
BOOK-CHAPTER
Plasma-Enhanced Chemical Vapor Deposition
Antonella MilellaFabio Palumbo
Year: 2014 Pages: 1-3