Self-Oscillating Microcantilever Piezoresistive Flow Sensor

BOOK-CHAPTER

Year: 2006 Key engineering materials Pages: 1347-1350 Publisher: Trans Tech Publications

DOI: 10.4028/0-87849-415-4.1347

Keywords:

Piezoresistive effect Flow sensor Materials science Flow (mathematics) Acoustics Mechanics Optoelectronics Physics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Heat Transfer and Boiling Studies

Physical Sciences → Engineering → Mechanical Engineering