Excimer laser beam shaping and material processing using diffractive optics

Stewart Williams; Paul J. Marsden; Nick C. Roberts; J. Sidhu; M. Venables

doi:10.1117/12.270277

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Excimer laser beam shaping and material processing using diffractive optics

Stewart Williams Paul J. Marsden Nick C. Roberts J. Sidhu M. Venables

Year: 1997 Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 3092 Pages: 431-431 Publisher: SPIE

DOI: 10.1117/12.270277

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Abstract

Diffractive optical systems have been developed to allow high efficiency material processing using excimer lasers. These systems allow beam homogenizing and shaping for surface treatment and parallel focusing for multiple hole drilling. Beam utilization factors of 80% have been achieved.

Keywords:

Optics Laser beams Excimer Beam (structure) Materials science Excimer laser Laser beam machining Materials processing Laser Diffraction efficiency Laser drilling Optoelectronics Diffraction Physics Engineering

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1.61

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Refs

0.84

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Is in top 1%

Is in top 10%

Topics

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Laser Design and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Excimer laser beam shaping and material processing using diffractive optics

Abstract

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