JOURNAL ARTICLE
235. Properties of radio-frequency sputtered beta-Ta films
Year: 1974 Journal: Vacuum Vol: 24 (3)Pages: 139-139 Publisher: Elsevier BV
Keywords:
BETA (programming language) Radio frequency Materials science Computer science Telecommunications
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Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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