NEMS Mass Sensors

Minami Yoda; Jean‐Luc Garden; Olivier Bourgeois; Aeraj Haque; Aloke Kumar; Hans Deyhle; Simone Hieber; Bert Müller; Mary Cano‐Sarabia; Daniel Maspoch; Константин Соболев; Florence Sanchez; Esmaiel Jabbari; J. Tanner Nevill; Daniele Malleo; Peter Bøggild; Wei Chen; Chunlei Wang; Manuel L. B. Palacio; Shrikant C. Nagpure; Mónica Lira‐Cantú; Irene González‐Valls; Rustom B. Bhiladvala; Nastassja A. Lewinski; Matthew Wright; Paola Martino; Paolo Allia; Alessandro Chiolerio; Jason P. Gleghorn; Celeste M. Nelson; Emiliano Descrovi; Mirko Ballarini; Francesca Frascella; Daniel Neuhauser; Christopher Arntsen; Kenneth A. Lopata; Xinyong Tao; Zheng Fan; Xiaobin Zhang; Soichiro Tsuda; Sylvain Martel; Didi Xu; Li Zhang; Lixin Dong; Bradley J. Nelson; Timothy J. Merkel; Joseph M. DeSimone; Lucio Colombi Ciacchi; Susan Köppen; Michael Nosonovsky; Dongchan Jang; Jason Li; Steve To; Lidan You; Yu Sun; Lorenzo Lunelli; Cristina Potrich; Laura Pasquardini; Cecilia Pederzolli; Mariangela Lombardi; Menghan Zhou; Jian He; Luca Boarino; Giampiero Amato; Ille C. Gebeshuber; David W. Lee; S. Bianco; Angelica Chiodoni; Claudio Gerbaldi; Marzia Quaglio; Andréa Toma; Remo Proietti Zaccaria; Roman Krahne; Alessandro Alabastri; Maria Laura Coluccio; Gobind Das; Carlo Liberale; Francesco De Angelis; Marco Francardi; Federico Mecarini; Francesco Gentile; Angelo Accardo; Liberato Manna; Enzo Di Fabrizio; Paola Rivolo; Kuo-Sheng Ma; Lu Dai; Yongfen Qi; Lixin Jia; Wei Yu; Jie Du; Bharat Bhushan; Satish C. Chaparala; Vikram Bhatia; Nipun Sinha; Matteo Rinaldi; Ramakrishna Podila; Benoy Anand; S. Siva Sankara Sai; K. Venkataramaniah; Reji Philip; Apparao M. Rao

doi:10.1007/978-90-481-9751-4_100590

BOOK-CHAPTER

NEMS Mass Sensors

Minami Yoda Jean‐Luc Garden Olivier Bourgeois Aeraj Haque Aloke Kumar Hans Deyhle Simone Hieber Bert Müller Mary Cano‐Sarabia Daniel Maspoch Константин Соболев Florence Sanchez Esmaiel Jabbari J. Tanner Nevill Daniele Malleo Peter Bøggild Wei Chen Chunlei Wang Bharat Bhushan Manuel L. B. Palacio Shrikant C. Nagpure Bharat Bhushan Mónica Lira‐Cantú Irene González‐Valls Bharat Bhushan Rustom B. Bhiladvala Nastassja A. Lewinski Matthew Wright Paola Martino Paolo Allia Alessandro Chiolerio Jason P. Gleghorn Celeste M. Nelson Emiliano Descrovi Mirko Ballarini Francesca Frascella Daniel Neuhauser Christopher Arntsen Kenneth A. Lopata Lixin Dong Xinyong Tao Zheng Fan Li Zhang Xiaobin Zhang Bradley J. Nelson Soichiro Tsuda Sylvain Martel Didi Xu Li Zhang Lixin Dong Bradley J. Nelson Timothy J. Merkel Joseph M. DeSimone Lucio Colombi Ciacchi Susan Köppen Michael Nosonovsky Dongchan Jang Jason Li Steve To Lidan You Yu Sun Lorenzo Lunelli Cristina Potrich Laura Pasquardini Cecilia Pederzolli Mariangela Lombardi Menghan Zhou Jian He Luca Boarino Giampiero Amato Ille C. Gebeshuber David W. Lee S. Bianco Angelica Chiodoni Claudio Gerbaldi Marzia Quaglio Andréa Toma Remo Proietti Zaccaria Roman Krahne Alessandro Alabastri Maria Laura Coluccio Gobind Das Carlo Liberale Francesco De Angelis Marco Francardi Federico Mecarini Francesco Gentile Angelo Accardo Liberato Manna Enzo Di Fabrizio Paola Rivolo Bharat Bhushan Kuo-Sheng Ma Lu Dai Yongfen Qi Lixin Jia Wei Yu Jie Du Bharat Bhushan Satish C. Chaparala Vikram Bhatia Nipun Sinha Matteo Rinaldi S. Siva Sankara Sai Ramakrishna Podila Benoy Anand S. Siva Sankara Sai K. Venkataramaniah Reji Philip Apparao M. Rao

Year: 2012 Pages: 1878-1878

DOI: 10.1007/978-90-481-9751-4_100590

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Keywords:

Nanoelectromechanical systems Nanotechnology Materials science

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Topics

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

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