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JOURNAL ARTICLE

Ion beam lithography

Year: 1984 Journal:   Microelectronics Journal Vol: 15 (1)Pages: 63-63   Publisher: Elsevier BV
DOI: 10.1016/s0026-2692(84)80027-0
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Keywords:
Lithography Ion beam lithography Ion Ion beam Materials science Stencil lithography Focused ion beam Electron-beam lithography Next-generation lithography Beam (structure) Optics Physics Optoelectronics Nanotechnology Resist

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Topics

Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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