Correction to “Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO₂, TiO₂, Al₂O₃ and HfO₂”

Abstract

RETURN TO ISSUEPREVAddition/CorrectionNEXTORIGINAL ARTICLEThis notice is a correctionCorrection to “Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3 and HfO2”Karsten ArtsKarsten ArtsMore by Karsten Artshttp://orcid.org/0000-0003-4266-6559, Mikko UtriainenMikko UtriainenMore by Mikko Utriainen, Riikka L. PuurunenRiikka L. PuurunenMore by Riikka L. Puurunen, Wilhelmus M. M. Kessels*Wilhelmus M. M. KesselsMore by Wilhelmus M. M. Kesselshttp://orcid.org/0000-0002-7630-8226, and Harm C. M. Knoops*Harm C. M. KnoopsMore by Harm C. M. Knoopshttp://orcid.org/0000-0003-2284-4477Cite this: J. Phys. Chem. C 2020, 124, 1, 1250Publication Date (Web):December 19, 2019Publication History Published online19 December 2019Published inissue 9 January 2020https://doi.org/10.1021/acs.jpcc.9b11082Copyright © 2019 American Chemical SocietyRIGHTS & PERMISSIONSACS AuthorChoicewith CC-BY-NC-NDlicenseArticle Views372Altmetric-Citations-LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstractCitation and referencesMore Options Share onFacebookTwitterWechatLinked InReddit PDF (287 KB) Get e-Alerts Get e-Alerts