JOURNAL ARTICLE
Oxidation study of Ge Condensation on SGOI Nanowire Biosensor Fabrication
Kow‐Ming ChangChu-Feng ChenChiung-Hui LaiChin-Ning WuCheng‐Ting HsiehYubin WangChung-Hsien Liu
Year: 2012 Journal: ECS Meeting Abstracts Vol: MA2012-01 (44)Pages: 1623-1623 Publisher: Institute of Physics
Abstract
Abstract not Available.
Keywords:
Fabrication Nanowire Condensation Biosensor Materials science Nanotechnology Germanium Chemical engineering Optoelectronics Physics Engineering Silicon Medicine Thermodynamics
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Topics
Analytical Chemistry and Sensors
Physical Sciences → Chemical Engineering → Bioengineering
Nanowire Synthesis and Applications
Physical Sciences → Engineering → Biomedical Engineering
Gas Sensing Nanomaterials and Sensors
Physical Sciences → Engineering → Electrical and Electronic Engineering
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