Continuous Deposition of Buffer Layers for YBCO Coated Conductor Using Reactive Magnetron Sputtering

Jian Yang; Huan-Qiang Liu; F. Qu; H. Zhang; Qiyan Zhou; H.W. Gu

doi:10.4028/0-87849-432-4.1871

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Continuous Deposition of Buffer Layers for YBCO Coated Conductor Using Reactive Magnetron Sputtering

Jian Yang Huan-Qiang Liu F. Qu H. Zhang Qiyan Zhou H.W. Gu

Year: 2007 Materials science forum Pages: 1871-1876 Publisher: Trans Tech Publications

DOI: 10.4028/0-87849-432-4.1871

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Keywords:

Materials science Deposition (geology) Buffer (optical fiber) Sputter deposition Conductor Cavity magnetron Sputtering Layer (electronics) Optoelectronics Chemical engineering Composite material Thin film Nanotechnology Electrical engineering Geology Engineering

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Continuous Deposition of Buffer Layers for YBCO Coated Conductor Using Reactive Magnetron Sputtering

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