COMPOSITIONAL SEPARATION IN Co-Cr THIN FILMS

JOURNAL ARTICLE

Year: 1997 Journal: Journal of the Magnetics Society of Japan Vol: 21 (S_3_PMRC_97_3)Pages: S3_34-34

DOI: 10.3379/jmsjmag.21.s3_34

Keywords:

Separation (statistics) Materials science Chemical engineering Computer science Engineering

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Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials