BOOK-CHAPTER
Plasma-Enhanced Chemical Vapor Deposition
Year: 1991 Elsevier eBooks Pages: 525-564 Publisher: Elsevier BV
Keywords:
Plasma Chemical vapor deposition Materials science Plasma-enhanced chemical vapor deposition Chemical engineering Plasma processing Nanotechnology Physics Engineering Nuclear physics
Metrics
12
Cited By
6.79
FWCI (Field Weighted Citation Impact)
98
Refs
0.98
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
High-Temperature Coating Behaviors
Physical Sciences → Engineering → Aerospace Engineering
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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