LOW TEMPERATURE PREPARATION OF SUPERCONDUCTING YBa2Cu3Ox THIN FILMS ON LiNbO3, SILICON AND SrTiO3 BY r.f.-MAGNETRON SPUTTERING

H. SCHMIDT; R. BRUCHHAUS; O. EIBL; W. HOESLER; L. HOFMANN; W. HOLUBARSCH; G. ZORN

doi:10.1016/b978-0-444-88006-2.50043-7

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LOW TEMPERATURE PREPARATION OF SUPERCONDUCTING YBa2Cu3Ox THIN FILMS ON LiNbO3, SILICON AND SrTiO3 BY r.f.-MAGNETRON SPUTTERING

H. SCHMIDT R. BRUCHHAUS O. EIBL W. HOESLER L. HOFMANN W. HOLUBARSCH G. ZORN

Year: 1989 Elsevier eBooks Pages: 287-293 Publisher: Elsevier BV

DOI: 10.1016/b978-0-444-88006-2.50043-7

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Keywords:

Sputter deposition Materials science Silicon Superconductivity Sputtering Thin film Cavity magnetron Optoelectronics Metallurgy Nanotechnology Condensed matter physics Physics

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Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Physics of Superconductivity and Magnetism

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

LOW TEMPERATURE PREPARATION OF SUPERCONDUCTING YBa2Cu3Ox THIN FILMS ON LiNbO3, SILICON AND SrTiO3 BY r.f.-MAGNETRON SPUTTERING

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