Modeling of Electrostatically Actuated Microplates

Libo Zhao; Zhuangde Jiang; Zhikang Li; Yihe Zhao

doi:10.1007/978-981-10-5945-2_4

ScienceGate Book Chapters

BOOK-CHAPTER

Modeling of Electrostatically Actuated Microplates

Libo Zhao Zhuangde Jiang Zhikang Li Yihe Zhao

Year: 2018 Micro/Nano technologies Pages: 99-153 Publisher: Springer Nature

DOI: 10.1007/978-981-10-5945-2_4

Get Full-Text PDF Get Analytical Report

Keywords:

Finite element method Actuator Capacitance Voltage Modeling and simulation Engineering Multiphysics Capacitor Deflection (physics) Electrostatics Electronic engineering Mechanical engineering Electrical engineering Physics Classical mechanics Structural engineering Simulation

Metrics

Cited By

1.39

FWCI (Field Weighted Citation Impact)

Refs

0.85

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Modeling of Electrostatically Actuated Microplates

Metrics

Citation History

Topics

Related Documents

Modeling of Electrostatically Actuated Microplates

Modeling Squeeze-Film Damping of Electrostatically Actuated Microplates Undergoing Large Deflections

Mechanical behavior analysis on electrostatically actuated rectangular microplates

Vibrations of parallel arrays of electrostatically actuated microplates

Symmetry Breaking and Multistability of Electrostatically Actuated Annular Microplates