JOURNAL ARTICLE
Finite-element Analysis for Simulation of Layered SAW Devices with
Year: 2008 Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 9999 Pages: 999905-999905 Publisher: SPIE
Keywords:
Finite element method Computer science Physics
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Topics
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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