JOURNAL ARTICLE
Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and O-rings
Year: 2009 Journal: Sealing Technology Vol: 2009 (4)Pages: 15-15 Publisher: Elsevier BV
Keywords:
Gasket Electrode Electrical conductor Materials science Plasma Composite material Polymer chemistry Electrical engineering Optoelectronics Engineering Chemistry Physics Nuclear physics Physical chemistry
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Cited By
0.00
FWCI (Field Weighted Citation Impact)
0
Refs
0.59
Citation Normalized Percentile
Is in top 1%
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Topics
Advanced materials and composites
Physical Sciences → Engineering → Mechanical Engineering
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Welding Techniques and Residual Stresses
Physical Sciences → Engineering → Mechanical Engineering
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