Tunable Wide Range and High Sensitivity Flexible Pressure Sensors with Ordered Multilevel Microstructures

Abstract

Abstract With the rapid development of healthcare and human‐machine interactions, there is a growing demand for flexible electronic skin to have a high sensitivity over a wide range. While current multilevel and hierarchical structures inspired by nature broadened the sensing range, the structural design still lacks systematic study. Hereby, an ordered multilevel microstructure is proposed, and the design strategy for performance regulation of piezoresistive pressure sensors is studied. Both microstructure height and spatial distribution are investigated systematically through simulation and experiments. The flexible piezoresistive pressure sensor is fabricated by combining a fast, cost‐effective laser marking technology, molding, and pneumatic spray. The fabricated sensors show high sensitivity (1.5 – 8.3 kPa −1 ) over a wide range (0.01 – 200 kPa), and have a detection limit of 10 Pa, a response time of below 70 ms, and a mechanical stability over 10 000 cycles. This design and fabrication strategy can be further optimized by combining advanced materials and fabrication systems, and is expected to be applicable for a wide range of flexible materials.