Piezostack deformable mirror with high technological effectiveness

Abstract

Abstract Deformable mirror (DM) is an active element that can change the shape of the surface to compensate for wavefront aberrations. Historically, the development of DMs started from piezostack deformable mirrors (PDM) due to their large stroke, flexibility in actuators geometry, high resonant frequency. However, the cost of PDMs is comparatively high because of their labor-intensive process of manufacturing. In the article innovative design of PDM is presented. The assembling of unconventional PDMs was carried out using piezoceramic combs. This step should allow to decrease number of technological steps, increase spatial resolution of the mirror and thereby reduce the cost of final product.