Sputtering deposition of aluminium molybdenum alloy thin film anodes for thin film microbatteries

Mani Chandran Thirumoolam; Balaji Sivaramakrishnan; Mutharasu Devarajan

doi:10.1007/s13391-014-4137-z

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Sputtering deposition of aluminium molybdenum alloy thin film anodes for thin film microbatteries

Mani Chandran Thirumoolam Balaji Sivaramakrishnan Mutharasu Devarajan

Year: 2015 Journal: Electronic Materials Letters Vol: 11 (3)Pages: 416-423 Publisher: Springer Science+Business Media

DOI: 10.1007/s13391-014-4137-z

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Keywords:

Materials science Sputtering Thin film Molybdenum Scanning electron microscope Aluminium Analytical Chemistry (journal) Alloy Deposition (geology) Annealing (glass) Porosity Anode Sputter deposition Metallurgy Composite material Nanotechnology Electrode Chemistry

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Advancements in Battery Materials

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and interfaces

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Sputtering deposition of aluminium molybdenum alloy thin film anodes for thin film microbatteries

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