BOOK-CHAPTER
Magnetron Sputtered TiNiCu Shape Memory Alloy Thin Film for MEMS Applications
Year: 2002 Microsystems Pages: 77-96 Publisher: Springer Nature
Keywords:
Materials science Shape-memory alloy Scanning electron microscope X-ray photoelectron spectroscopy Thin film Sputter deposition Sputtering Composite material Microstructure Coating Metallurgy Nanotechnology Chemical engineering
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FWCI (Field Weighted Citation Impact)
33
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0.02
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Topics
Shape Memory Alloy Transformations
Physical Sciences → Materials Science → Materials Chemistry
Transition Metal Oxide Nanomaterials
Physical Sciences → Materials Science → Polymers and Plastics
Ferroelectric and Piezoelectric Materials
Physical Sciences → Materials Science → Materials Chemistry
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