BOOK-CHAPTER

Magnetron Sputtered TiNiCu Shape Memory Alloy Thin Film for MEMS Applications

Keywords:
Materials science Shape-memory alloy Scanning electron microscope X-ray photoelectron spectroscopy Thin film Sputter deposition Sputtering Composite material Microstructure Coating Metallurgy Nanotechnology Chemical engineering

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Topics

Shape Memory Alloy Transformations
Physical Sciences →  Materials Science →  Materials Chemistry
Transition Metal Oxide Nanomaterials
Physical Sciences →  Materials Science →  Polymers and Plastics
Ferroelectric and Piezoelectric Materials
Physical Sciences →  Materials Science →  Materials Chemistry

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