Silicon Micromachined Microphotonics

JOURNAL ARTICLE

Year: 1996

DOI: 10.7567/ssdm.1996.d-4-1

Keywords:

Materials science Surface micromachining Silicon Optoelectronics Nanotechnology Engineering physics Fabrication Engineering

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Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering