Formation of dense nanostructures on femtosecond laser-processed silicon carbide surfaces

Jiangyou Long; Ziyu He; Deyi Ou; Yajun Huang; Pengchao Wang; Qinglei Ren; Xiaozhu Xie

doi:10.1016/j.surfin.2021.101624

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Formation of dense nanostructures on femtosecond laser-processed silicon carbide surfaces

Jiangyou Long Ziyu He Deyi Ou Yajun Huang Pengchao Wang Qinglei Ren Xiaozhu Xie

Year: 2021 Journal: Surfaces and Interfaces Vol: 28 Pages: 101624-101624 Publisher: Elsevier BV

DOI: 10.1016/j.surfin.2021.101624

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Keywords:

Materials science Laser Femtosecond Nanostructure Silicon carbide Silicon Laser ablation Surface micromachining Optoelectronics Amorphous solid Optics Nanotechnology Fabrication Composite material Crystallography

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Formation of dense nanostructures on femtosecond laser-processed silicon carbide surfaces

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