A flexible triaxial force capacitive sensor with microstructure electrode and orthogonal microstructure

Abstract

This paper presents a novel flexible triaxial force sensor based on the capacitive pressure sensor array. The main structures of the sensor consist of the triangular pyramid microstructure electrode and the orthogonal triangular pyramid microstructure with the spacing of $20\ \mu\ \mathrm{m}$, which makes the sensor have a large pressure detection range and high sensitivity at the same time. The triaxial force sensor based on the sensor array can measure the triaxial force in real time, and the ranges of normal force and tangential force are 0–3 N and 0–0.5 N, respectively. The proposed flexible triaxial force sensor is expected to have a good application prospect in the field of human-computer interaction.