Dimensional-Nanopatterned Piezoresistive Silicon Microcantilever for Environmental Sensing

BOOK-CHAPTER

Year: 2021 Pages: 19-47

DOI: 10.24355/dbbs.084-202201241239-0

Keywords:

Piezoresistive effect Microelectromechanical systems Materials science Nanotechnology Silicon Explosive material Optoelectronics Chemistry

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Cited By

2.59

FWCI (Field Weighted Citation Impact)

Refs

0.92

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering