JOURNAL ARTICLE

Atomic layer deposition of palladium thin film from palladium (II) hexafluoroacetylacetonate and ozone reactant

Keywords:
Palladium Silicon Materials science Atomic layer deposition Thin film Layer (electronics) Metal Chemical engineering Deposition (geology) Sapphire Platinum Inorganic chemistry Analytical Chemistry (journal) Catalysis Chemistry Nanotechnology Metallurgy Organic chemistry Optics

Metrics

10
Cited By
0.73
FWCI (Field Weighted Citation Impact)
40
Refs
0.72
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Catalytic Processes in Materials Science
Physical Sciences →  Materials Science →  Materials Chemistry
Electronic and Structural Properties of Oxides
Physical Sciences →  Materials Science →  Materials Chemistry
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