BOOK-CHAPTER
Electron Beam Lithography
Keywords:
Electronic circuit Chip Electron-beam lithography Lithography Integrated circuit Computer science Optoelectronics Physics Materials science Electrical engineering Nanotechnology Engineering Resist Telecommunications
Metrics
2
Cited By
2.02
FWCI (Field Weighted Citation Impact)
2
Refs
0.90
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Advancements in Photolithography Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
Related Documents
JOURNAL ARTICLE
Electron beam lithography
Journal: Contemporary Physics Year: 1981 Vol: 22 (3)Pages: 265-290